Determination of hydrogen concentration in amorphous silicon films by nuclear elastic scattering (NES) of 100 MeV 3He2+
- 30 June 1981
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 38 (12) , 1249-1251
- https://doi.org/10.1016/0038-1098(81)90999-6
Abstract
No abstract availableKeywords
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