LOW-DAMAGE SURFACE TREATMENT BY GAS CLUSTER-ION BEAMS

• 1 February 1996
• journal article
• conference paper
• Published by World Scientific Pub Co Pte Ltd in Surface Review and Letters
• Vol. 03  (01) , 891-895
• https://doi.org/10.1142/s0218625x96001601

Abstract

Keywords

• ROOM TEMPERATURE