Fabrication Of Deep Bragg Gratings For DFB Lasers And Waveguide Filters By Wet And Dry Etching Processes In InGaAsP

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Abstract
Mask generation, etching process and cha-racterization of first-order deep Bragg grating corrugations on InP and InGaAsP compound material is presented. DFB lasers with a side-mode suppression of more than 30 dB were obtained. In addition nine different monolithic grating filters on rib waveguides proved to be valuable for narrow-band wavelength division multiplexing (WDM) applications.© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.