An Introduction to Lithography

• 3 May 1983
• book chapter
• Published by American Chemical Society (ACS)
• p. 1-13
• https://doi.org/10.1021/bk-1983-0219.ch001

Abstract

Keywords

• JUNCTION
• SILICON
• LITHOGRAPHY
• INVENTION
• FABRICATION
• PLANAR
• SEMICONDUCTOR DEVICES
• MATERIAL FOR SEMICONDUCTOR