Extreme ultraviolet multilayer reflectors
- 1 January 1986
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 147 (1) , 260-267
- https://doi.org/10.1063/1.35996
Abstract
We have investigated the design, fabrication, and reflectance measurements of a multilayer silver/silicon reflector for use at 58.4 nm. Our results indicate that reflectors in the extreme ultraviolet do not perform as well as predicted due to the presence of surface oxides and other surface contamination layers. In addition, we have found that the correct optical constants for silver have now been published. We find also that these multilayer coatings can be utilized as reflective polarizers in the EUV with an extinction ratio of 75:1 and a throughput of 28% for the s‐polarized component of the beam.Keywords
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