An in-the-lens spectrometer for high performance E-beam testing
- 1 January 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 7 (2-4) , 155-161
- https://doi.org/10.1016/s0167-9317(87)80007-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Magnetic field paralleliser for 2π electron-spectrometer and electron-image magnifierJournal of Physics E: Scientific Instruments, 1983