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High performance CMOS surrounding gate transistor (SGT) for ultra high density LSIs
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Publications
High performance CMOS surrounding gate transistor (SGT) for ultra high density LSIs
High performance CMOS surrounding gate transistor (SGT) for ultra high density LSIs
HT
H. Takato
H. Takato
KS
K. Sunouchi
K. Sunouchi
NO
N. Okabe
N. Okabe
AN
A. Nitayama
A. Nitayama
KH
K. Hieda
K. Hieda
FH
F. Horiguchi
F. Horiguchi
FM
F. Masuoka
F. Masuoka
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6 January 2003
proceedings article
Published by
Institute of Electrical and Electronics Engineers (IEEE)
p.
222-225
https://doi.org/10.1109/iedm.1988.32796
Abstract
No abstract available
Keywords
CMOS INVERTER
SEMICONDUCTOR DEVICE FABRICATION
CMOS INTEGRATED CIRCUITS
RELIABILITY
VERY LARGE SCALE INTEGRATION
VLSI
FEATURES
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