Novel ablation of fused quartz by preirradiation of vacuum-ultraviolet laser beams followed by fourth harmonics irradiation of Nd:YAG laser
- 19 September 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (12) , 1510-1512
- https://doi.org/10.1063/1.112027
Abstract
Preirradiation using vacuum‐ultraviolet (VUV) beams of anti‐Stokes stimulated Raman scattering VUV laser, followed by the fundamental beam (266 nm) irradiation, provides a novel scheme for fused quartz ablation. The preirradiation of 5th‐ (171 nm) or 6th‐ (160 nm) order anti‐Stokes beams realizes significant ablation with the succeeding fundamental beam irradiation of a laser fluence less than the ablation threshold. X‐ray photoelectron spectroscopy analysis reveals that SiOx(x < 2) is created in the fused quartz by photolysis using the anti‐Stokes beams. Each effect of the preirradiation and the succeeding fundamental beam irradiation in the ablation process is discussed.Keywords
This publication has 7 references indexed in Scilit:
- Micropatterning of Quartz Substrates by Multi-WavelengthVacuum-Ultraviolet Laser AblationJapanese Journal of Applied Physics, 1993
- Maskless writing of submicrometer gratings in fused silica by focused ion beam implantation and differential wet etchingApplied Physics Letters, 1993
- Bragg gratings fabricated in monomode photosensitive optical fiber by UV exposure through a phase maskApplied Physics Letters, 1993
- Nanosecond and femtosecond excimer laser ablation of fused silicaApplied Physics A, 1992
- Photoablation Studies of Polymers, Quartz, and Semiconductors with Vacuum Ultraviolet Laser RadiationMRS Proceedings, 1991
- Controlled etching of silicate glasses by pulsed ultraviolet laser radiationJournal of Vacuum Science & Technology B, 1988
- High-reflectivity monomode-fibre grating filtersElectronics Letters, 1986