Yield and Angular Distribution of Cesium-Sputtered Molybdenum

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Abstract
A radioactive tracer technique has been adapted to the measurement of the yield (atoms/ion) and angular distribution (atoms/ion/sr) of molybdenum sputtered by a cesium ion beam normal to the (100) crystallographic face. The energy of the ion was varied from 1 to 7.5 keV, and the target temperature was varied from 77° to 473°K. The yield increased with energy and decreased with target temperature. Preferred emission in the 〈100〉 direction was measured, but emission in the 〈111〉 direction could not be resolved. The importance of ion channeling and the effects of thermal annealing on ion‐induced damage are emphasized.