RF Discharge Modeling Through Solutions to the Moments of the Boltzmann Transport Equations
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Fluid model simulations of a 13.56-MHz rf discharge: Time and space dependence of rates of electron impact excitationJournal of Applied Physics, 1987
- A Continuum Model of DC and RF DischargesIEEE Transactions on Plasma Science, 1986