CAPSS: A thin diaphragm capacitive pressure sensor simulator
- 31 January 1987
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 11 (1) , 1-22
- https://doi.org/10.1016/0250-6874(87)85001-1
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- A high-sensitivity integrated-circuit capacitive pressure transducerIEEE Transactions on Electron Devices, 1982
- A monolithic capacitive pressure sensor with pulse-period outputIEEE Transactions on Electron Devices, 1980
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Elastic Moduli of Silicon vs Hydrostatic Pressure at 25.0°C and − 195.8°CJournal of Applied Physics, 1964