Ion energy distribution in ion plating
- 1 May 1983
- Vol. 33 (5) , 279-284
- https://doi.org/10.1016/0042-207x(83)90092-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Simple parallel plate energy analyser for measuring the energy distribution of metal vapours in a dischargeJournal of Physics E: Scientific Instruments, 1980
- The energies of ions and neutrals in ion platingJournal of Physics D: Applied Physics, 1976
- Fundamentals of Ion PlatingJournal of Vacuum Science and Technology, 1973
- Ion Energies at the Cathode of a Glow DischargePhysical Review B, 1963
- The exchange of charge between ions and atomsProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1951