Deposition of Tantalum Thin Films by Ion Beam Sputtering

• 1 July 1977
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 16  (7) , 1245-1246
• https://doi.org/10.1143/jjap.16.1245

Abstract

Keywords

• DEPOSITION
• ION BEAM SPUTTERING
• FILMS BY ION
• TANTALUM THIN FILMS