Optical technique for producing 0.1-μ periodic surface structures
- 1 August 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 23 (3) , 154-155
- https://doi.org/10.1063/1.1654841
Abstract
Surface corrugations with a period of 1108 Å and a depth of [inverted lazy s] 500 Å have been fabricated in glass. These corrugations were first produced in a photoresist film on glass by the optical interference of two 3250‐Å laser beams. The corrugation was transferred to the glass by ion beam etching.Keywords
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