Growth Behavior of Cubic Boron Nitride Films in a Two-Step Process: Changing Bias Voltage, Gas Composition, and Substrate Temperature
- 18 April 2002
- journal article
- research article
- Published by Wiley in Advanced Functional Materials
- Vol. 12 (4) , 250-254
- https://doi.org/10.1002/1616-3028(20020418)12:4<250::aid-adfm250>3.0.co;2-l
Abstract
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