Ion milling (ion-beam etching), 1954–1975: A bibliography
- 1 November 1975
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 12 (6) , 1389-1398
- https://doi.org/10.1116/1.568549
Abstract
The ion milling process is briefly described as an introduction to the extensive bibliography presented on this process and its varied applications. (AIP)Keywords
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