Some characteristics and uses of low-pressure plasmas in materials science

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 5-15
• https://doi.org/10.1116/1.569159

Abstract

Keywords

• PRESSURE PLASMAS
• LOW PRESSURE
• MATERIALS SCIENCE
• CHARACTERISTICS AND USES