Holographic photolithography for submicron VLSI structures
- 30 April 1990
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 11 (1-4) , 127-131
- https://doi.org/10.1016/0167-9317(90)90087-a
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Understanding Focus Effects In Submicrometer Optical LithographyOptical Engineering, 1988
- HOLOGRAPHY WITH TOTAL INTERNALLY REFLECTED LIGHTApplied Physics Letters, 1967