Automation of Visual Inspection of LSI Photomask Patterns by Comparing Extracted Local Features of Pattern
- 1 January 1983
- journal article
- Published by The Society of Instrument and Control Engineers in Transactions of the Society of Instrument and Control Engineers
- Vol. 19 (11) , 903-908
- https://doi.org/10.9746/sicetr1965.19.903
Abstract
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