Characterization of defect reduction and aluminum redistribution in silicon implanted SOS films
- 30 June 1982
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 58 (1) , 53-60
- https://doi.org/10.1016/0022-0248(82)90209-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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