A polysilicon base bipolar transistor

• 1 January 1979
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• https://doi.org/10.1109/iedm.1979.189670

Abstract

Keywords

• IMPURITIES
• BIPOLAR TRANSISTORS
• ETCHING
• ANNEALING
• ATOMIC LAYER DEPOSITION
• SINGLE CRYSTAL
• BIPOLAR TRANSISTOR