Progress in the Development of SAW Resonator Pressure Transducers

• 1 January 1980
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 696-701
• https://doi.org/10.1109/ultsym.1980.197489

Abstract

Keywords

• SURFACE ACOUSTIC WAVES
• TRANSDUCERS
• TEMPERATURE SENSORS
• FREQUENCY
• OSCILLATORS
• TEMPERATURE DISTRIBUTION
• COSTS
• FABRICATION
• SENSOR PHENOMENA AND CHARACTERIZATION
• PACKAGING