Optical and electrical characterization of pseudomorphic AlGaAs/InGaAs/GaAs modulation-doped structures processed by rapid thermal annealing
- 1 March 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 7 (2) , 380-383
- https://doi.org/10.1116/1.584755
Abstract
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