Ohmic contacts to semiconducting diamond
- 1 July 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 9 (7) , 350-351
- https://doi.org/10.1109/55.740
Abstract
A solid-state reaction process for producing ohmic contacts to polished natural semiconducting diamond surfaces is discussed. The approach attempts to systematically characterize the processes which occur when metallic films of known thickness are deposited on a smooth diamond surface and annealed in the solid state under controlled conditions. Annealed tantalum/gold and titanium/gold deposits onKeywords
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