Structured luminescent porous silicon layers produced with laser assisted chemical etching

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Abstract
An approach to the problem of preparation of laterally structured luminescent porous silicon is proposed. The effect is based on the photosensitivity of chemical etching of silicon. Contrary to the other technique recently reported where the porous layer was modified with laser assisted dissolution, a one stage fast anodization-free process is used. Any desired 2D microstructure can be produced, depending on the illumination pattern, which is defined by optical imaging. The accuracy of the method as well as morphology and the luminescent properties of the prepared layers are studied.