Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

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1 January 1977

journal article
other
Published by SAGE Publications in Applied Spectroscopy

Vol. 31 (1) , 40-42
https://doi.org/10.1366/000370277774463193

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum
Applied Spectroscopy, 1976