Automated measurement and analysis of MIS interfaces in narrow-bandgap semiconductors
- 1 May 1981
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 28 (5) , 546-551
- https://doi.org/10.1109/t-ed.1981.20380
Abstract
A computerized system for simultaneous measurement of high-frequency and quasi-static MIS capacitance is described. The importance of this simultaneity in the application of various analysis methods to MIS devices in narrow-bandgap semiconductors is discussed. Results on the interfaces of mercury-cadmium-telluride with zinc sulfide and anodic oxide are given.Keywords
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