A closed-cycle gas recirculating system for rare-gas halide excimer lasers
- 1 March 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (5) , 291-292
- https://doi.org/10.1063/1.90024
Abstract
A closed‐cycle recirculating system is described which enables prolonged operation of a rare‐gas halide excimer laser on a single charge of rare‐gas mixture. The flowing gas is continuously purified in a high‐temperature titanium gettering furnace, following removal of the halogen by reaction to form a volatile, but condensable, metal halide. The halogen is reintroduced after the rare‐gas purification, being consumed in the operation of the laser along with the gettering metal.Keywords
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