Defects in silicon substrates
- 1 January 1977
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 14 (1) , 17-31
- https://doi.org/10.1116/1.569117
Abstract
This paper reviews some defects of major importance in silicon substrates: their nature and geometrical distribution; the mechanism of formation; their interplays; and their implications. Topics discussed include swirl aggregates of point-defect clusters and dislocation clusters; dislocations generated by thermal stresses; stacking faults generated by thermal oxidation both on the surface and in the bulk of substrates; and clustering and precipitation of oxygen.Keywords
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