Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography

• 1 August 1998
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 10  (11) , 849-852
• https://doi.org/10.1002/(sici)1521-4095(199808)10:11<849::aid-adma849>3.0.co;2-5

Abstract

Keywords

• TITANIUM