An angular rate sensor interface IC

23 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 311-314
https://doi.org/10.1109/cicc.1996.510565

Abstract

This paper describes an interface IC that maintains the vibration of a surface micro-machined yaw rate sensor and processes its angular rate signal. In addition, it provides the necessary electronics to compensate for the nonuniformities, parameter shifts with temperature, and offset and sensitivity variations of the sensor. The IC has been fabricated in a 1.2 /spl mu/m CMOS process that includes a high voltage MOS transistor. Experimental results of several key circuit blocks and the angular rate sensor system indicate proper operation over temperature and supply voltage.

Keywords

TEMPERATURE SENSORS
SENSOR PHENOMENA AND CHARACTERIZATION
BANDWIDTH
SENSOR SYSTEMS
INTEGRATED CIRCUIT NOISE
VOLTAGE
VEHICLE DRIVING
TURNING
TEMPERATURE DISTRIBUTION
CMOS PROCESS

This publication has 1 reference indexed in Scilit:

Generalized translinear circuit principle
IEEE Journal of Solid-State Circuits, 1991