Thermoreflectance optical test probe for the measurement of current‐induced temperature changes in microelectronic components
- 1 July 1993
- journal article
- research article
- Published by Wiley in Quality and Reliability Engineering International
- Vol. 9 (4) , 303-308
- https://doi.org/10.1002/qre.4680090411
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Thermal and plasma wave depth profiling in siliconApplied Physics Letters, 1985
- Detection of thermal waves through optical reflectanceApplied Physics Letters, 1985
- Temperature dependence of the optical properties of siliconJournal of Applied Physics, 1979