Oxidation of Si[sub 1−y]C[sub y] (0≤y≤0.02) strained layers grown on Si(001)

• 1 May 1998
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 16  (3) , 1757
• https://doi.org/10.1116/1.590050

Abstract

Keywords

• OXIDATION OF SI
• SUB
• STRAINED LAYERS GROWN