Spectroscopic diagnostics of plasma-chemical-vapor deposition from silane and germane
- 15 April 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (8) , 3055-3060
- https://doi.org/10.1063/1.337857
Abstract
Coherent anti-Stokes Raman spectroscopy (CARS), laser-induced fluorescence (LIF), and emission spectroscopy are employed for the diagnostics of radio-frequency discharge plasmas of silane and germane; CARS signal of germane molecule; and LIF signal and ultraviolet emission signal of germanium atom in discharges, as well as signals from nongermanium-related neutral species are measured. The effect of hydrogen dilution on emission signal intensities in the steady-state discharge explains dynamic behaviors of the emission and CARS signal intensities in the closed discharge; these spectroscopic techniques are powerful diagnostic tools for gas-phase processes using mixed gas sources.This publication has 22 references indexed in Scilit:
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