Vacuum Shear Force Microscopy Application to High Resolution Work
- 1 July 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (7B) , L826-829
- https://doi.org/10.1143/jjap.38.l826
Abstract
A new technique–Vacuum Shear Force Microscopy (VSFM)–is introduced as a reliable method for maintaining a constant separation between a probe and sample. Elimination of many of the instabilities observed when applying the shear force mechanism to imaging under ambient conditions, allows for routine nanometer lateral and sub-nanometer normal resolution. In this paper this technique is applied, firstly, to the imaging of microtubules (biology) and, secondly, to the patterning and subsequent imaging of nanoscale metal lines (nanofabrication).Keywords
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