Self-development mechanism of nitrocellulose: Heating effect

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Abstract
The decomposition of a nitrocellulose resist was achieved by heat treatment in order to investigate the chemical decomposition of the resist due to the electronic collisions in the self-developing process. The decomposition process was evaluated by monitoring the changes in the film thickness and the infrared spectra. A residue left after the heating was quantitatively analyzed. It is concluded that the breakage of the RONO2 bond triggered the decomposition, and the oxidation with the oxygen supplied from NO2 accelerates the decomposition.

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