Compact superconducting SR ring for X-ray lithography
- 1 April 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 24-25, 425-428
- https://doi.org/10.1016/0168-583x(87)90675-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The table-top synchrotron radiation source “Klein Erna”Nuclear Instruments and Methods in Physics Research, 1982
- A status report on the SURF II synchrotron radiation facility at NBSNuclear Instruments and Methods, 1980