Laser annealing of bipolar NPN transistors

• 1 April 1981
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 18  (3) , 818-820
• https://doi.org/10.1116/1.570954

Abstract

Keywords

• LASER ANNEALING
• BIPOLAR NPN TRANSISTORS
• ANNEALING OF BIPOLAR