Kinetic modeling of microscopic processes during electron cyclotron resonance microwave plasma-assisted molecular beam epitaxial growth of GaN/GaAs-based heterostructures
- 11 March 1996
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 68 (11) , 1510-1512
- https://doi.org/10.1063/1.115682
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