Titanium Phosphide Coatings from the Atmospheric Pressure Chemical Vapor Deposition of TiCl4 and RPH2 (R = t-Bu, Ph, CyHex)
- 12 June 2002
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 14 (7) , 3167-3173
- https://doi.org/10.1021/cm0200792
Abstract
No abstract availableKeywords
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