Defects Induced by Reactive Ion Etching (RIE) in GaAs and Correlation with EL2

• 1 January 1989
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 38-41, 67-72
• https://doi.org/10.4028/www.scientific.net/msf.38-41.67

Abstract

Keywords

• REACTIVE ION ETCHING