Electron Energy Distribution Functions in an O2 Glow Discharge
- 15 January 1973
- journal article
- Published by Canadian Science Publishing in Canadian Journal of Physics
- Vol. 51 (2) , 144-148
- https://doi.org/10.1139/p73-017
Abstract
A Langmuir probe technique has been used to measure electron energy distribution functions in the positive column of a DC glow discharge in oxygen. The electron energy distribution function is shown to fit a functional form given by f(E) = CE1/2 exp (−BEn) where n = 1.6 ± 0.1; the average electron energies lie between 4.4 and 5.0 eV.Keywords
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