Properties of a movable-gate–field-effect structure as an electromechanical sensor

• 1 September 1978
• journal article
• Published by Acoustical Society of America (ASA) in The Journal of the Acoustical Society of America
• Vol. 64  (3) , 725-730
• https://doi.org/10.1121/1.382036

Abstract

Keywords

• PROPERTIES
• ELECTROMECHANICAL SENSOR
• MOVABLE GATE
• FIELD EFFECT
• EFFECT STRUCTURE