A Detailed Procedure for Reliable Preparation of Tem Samples Using Fib Milling
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
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This publication has 1 reference indexed in Scilit:
- Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beamJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993