Integrated-optical acoustical sensors
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 93-97
- https://doi.org/10.1016/0924-4247(94)80094-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Integrated optical nanomechanical devices as modulators, switches, and tunable frequency filters, and as acoustical sensorsPublished by SPIE-Intl Soc Optical Eng ,1993
- Integrated optical interferometer as a light modulator and microphoneSensors and Actuators A: Physical, 1991
- Nanomechano-Grating-Coupler-Modulator And Integrated Optical MicrophonePublished by SPIE-Intl Soc Optical Eng ,1989