Effects of nonradiative de-excitation of excited sputtered atoms near silicon and silicon dioxide surfaces
- 2 April 1975
- journal article
- other
- Published by Elsevier in Surface Science
- Vol. 49 (2) , 657-663
- https://doi.org/10.1016/0039-6028(75)90378-7
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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