Nanoscale replication for scanning probe data storage

• 30 December 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 69  (27) , 4262-4264
• https://doi.org/10.1063/1.116965

Abstract

Keywords

• ELECTRON BEAM LITHOGRAPHY
• DATA STORAGE
• ATOMIC FORCE MICROSCOPY
• OPTICAL STORAGE