Effects of doping on growth in the dichlorosilane/germane system

• 1 May 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (3) , 1129-1133
• https://doi.org/10.1116/1.586826

Abstract

Keywords

• DICHLOROSILANE/GERMANE SYSTEM
• GROWTH IN THE DICHLOROSILANE/GERMANE
• EFFECTS OF DOPING ON GROWTH