Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 75-80
- https://doi.org/10.1016/s0924-4247(98)00104-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Stacked multichip-module technology for high-performance intelligent transducersPublished by SPIE-Intl Soc Optical Eng ,1996
- Photolithography on micromachined 3D surfaces using electrodeposited photoresistsSensors and Actuators A: Physical, 1995