Plasma polymerization of ethane. II. Theoretical analysis of effluent gas composition and polymer deposition rates
- 1 June 1983
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 3 (2) , 163-192
- https://doi.org/10.1007/bf00566019
Abstract
No abstract availableKeywords
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